SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)

Copyright © 2024 Nathaniel Hardesty, Licensed under the MIT License

This software is created by a third-party and not endorsed or supported by SEMI.

The codebase will be updated to reflect more up-to-date SEMI standards if/when they can be acquired for this purpose.

Based on:

• SEMI E5-0813

SECS-II is a protocol designed to facilitate a common syntactic and semantic message structure used in communications between semiconductor equipment.

Most commonly, the HSMS (SEMI E37) or SECS-I (SEMI E4) protocols are used to transmit SECS-II formatted messages.

Most commonly, the GEM (SEMI E30) and OSS (SEMI E39) protocols are used to integrate host/equipment communication and behavior using SECS-II messages.